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FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質(zhì)量流量控制器OMEGA

20多種氣體校準(zhǔn)，包括氦氣、氧氣、氖氣、***氧化二氮、氮?dú)狻⒋髿狻鍤狻?**氧化碳、二氧化碳、甲烷、乙烷、氫氣、丙烷、丁烷、異丁烷、乙烯、乙炔、氪氣、氙氣、六氟化硫

同時(shí)顯示壓力、溫度、體積以及質(zhì)量流量

簡(jiǎn)單易用的按鈕界面

NIST 可溯源性標(biāo)準(zhǔn)

滿量程范圍：0.5 SCCM ~ 3000 LPM

常規(guī)響應(yīng)時(shí)間：50 ~ 100 毫秒

常規(guī)量程比：100:1

位置不敏感

±0.8%讀數(shù)精度

標(biāo)配RS232

FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質(zhì)量流量控制器OMEGA

Accuracy: (+0.8% of readings + 0.2% of full range)

Repeatability: Full range (+0.2%)

Range ratio: 100:1

Control response time: 100 ms

Input control signal: 0 ~ 5 Vdc, RS232

Output signal: 0 ~ 5 Vdc, RS232

Optional Input/Output: 4-20 mA, 0-10 Vdc

Working temperature: 10 ~ 50 degree C (14 ~ 50.00 degree C)

Zero offset: 0.02%/~C of full range

Range migration: 0.02%/C of full range

Humidity range: 0 - 100% RH, no condensation

Additional velocity: 2.4% of full range

Contact material: 303 and 302 stainless steel, fluororubber, silicone RTV (rubber), glass reinforced nylon, aluminium, copper, 410 stainless steel, silicone, glass; > 250 SLM: 416 stainless steel and nickel replacement copper

Maximum pressure

Mass Flow Controller: 145 psig

Use Volume Model: Use Volume Model: Near the Atmosphere, recommended a maximum of 15 psig.

Volume flowmeters and controllers do not guarantee the accuracy of mass flow rate beyond the rated flow range of flowmeters. These values are only applicable to near-atmospheric pressure conditions. The recommended maximum working pressure is 15 psig

Rating minimum differential pressure: 5 SLM and below: 5 psid; 10-250 SLM: 15 psid; 500 SLM: 5 psid; 1500 SLM: 10 PSID

Power supply current: 20 SLM and below 0.250 A; 50 SLM and above 0.75 A (conventional)

Power supply voltage: 20 SLM and smaller equipment 12-30 Vdc; 50 SLM and larger equipment 24-30 Vdc

Electrical connection: 8 pins circular Mini DIN

FMA-2622A-I_FMA-2622A-I2_FMA-2622A-V2_FMA-2622A-VOL質(zhì)量流量控制器OMEGA

FMA-2600A系列質(zhì)量與體積流量控制器在層流場(chǎng)中使用差壓原則來(lái)確定和控制質(zhì)量流速。流量計(jì)中的層流元件(LFE)迫使氣體進(jìn)入層流。泊肅葉方程規(guī)定， 在這***區(qū)域體積流速與壓力下降呈線性關(guān)系。使用壓差傳感器衡量LFE固定距離中的壓力下降情況。同時(shí)結(jié)合氣體的粘度準(zhǔn)確判定體積流速。引入單獨(dú)的絕對(duì)溫度和壓力傳感器，并根據(jù)***系列標(biāo)準(zhǔn)條件糾正氣體流速。這種標(biāo)準(zhǔn)流速俗稱質(zhì)量流速，并使用每分鐘標(biāo)準(zhǔn)立方英尺(SCFM)或每分鐘標(biāo)準(zhǔn)升(SLM)等單位表示。

該控制器采用連接到流體的真正比例閥，通過(guò)***體化PID回路控制器控制流體。標(biāo)準(zhǔn)設(shè)備包括0 ~ 5 V輸出（可選4 ~ 20 mA）和RS232通訊。可通過(guò)前面板鍵盤(pán)或RS232通訊調(diào)整氣體選擇功能和設(shè)定值。體積 流量、質(zhì)量流量、絕對(duì)壓力以及溫度均可以通過(guò)RS232連接查看或記錄。同時(shí)，在距離為46 m (150')的同***串口連接上，***多可與26臺(tái)設(shè)備進(jìn)行多點(diǎn)通訊。